Modelling and analysis of fringing and metal thickness effects in MEMS parallel plate capacitors

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Shah, Kriyang, Singh, Jugdutt and Zayegh, Aladin ORCID: 0000-0002-0924-4840 (2006) Modelling and analysis of fringing and metal thickness effects in MEMS parallel plate capacitors. In: Microelectronics, MEMS, and Nanotechnology, 11 Dec 2005 - 14 Dec 2005, Brisbane, Australia.

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Item type Conference or Workshop Item (Paper)
URI https://vuir.vu.edu.au/id/eprint/41537
DOI 10.1117/12.638385
Official URL https://www.spiedigitallibrary.org/conference-proc...
Subjects Historical > FOR Classification > 0906 Electrical and Electronic Engineering
Current > Division/Research > College of Science and Engineering
Citations in Scopus 13 - View on Scopus
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