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Silicon Implementation of Micro Pressure Sensor

Wahab, Yufridin, Zayegh, Aladin and Begg, Rezaul (2010) Silicon Implementation of Micro Pressure Sensor. In: 2010 International Conference on Electronic Devices, Systems & Applications : ICEDSA proceedings : Best Western Premier Sri Pacific Hotel, Kuala Lumpur, 12-13 April 2010. IEEE, Piscataway, N.J., pp. 232-235.

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Abstract

Pressure sensing is one of the mostly performed measurement encompassing varieties of applications. The latest technology such as silicon based Micro-electromechanical Systems (MEMS) technology is favoured due to its competitive cost and proven performance. In our research, MEMS pressure sensor for biomedical application is investigated. There are a number of stages involved in our research for implementation of a MEMS pressure sensor which includes application review, conceptual design, modeling, simulation, tape-out, fabrication and characterization. A highly proven technology offered by Infineon Technologies SensorNor AS is used in this research and the requirements are discussed. Recently, the device is successfully implemented on silicon and our research is now entering the characterization stage. In this paper, the research work prior to fabrication, the fabrication result and the post foundry packaging tasks for full device characterization are discussed. Future works are also discussed in the final section.

Item Type: Book Section
ISBN: 9781424466320
Uncontrolled Keywords: ResPubID21294, bioMEMS, micromachining, microsensors, pressure sensors, MEMS technology, biomedical application, fabrication, micro pressure sensor, silicon implementation, biomedical measurements, biosensors, costs, fabrication, microelectromechanical systems, micromechanical devices, performance evaluation, pressure measurement, sensor phenomena and characterisation
Subjects: FOR Classification > 1004 Medical Biotechnology
SEO Classification > 8616 Computer Hardware and Electronic Equipment
Faculty/School/Research Centre/Department > Centre for Telecommunications and Micro-Electronics (CTME)
Depositing User: VUIR
Date Deposited: 05 Jun 2013 05:06
Last Modified: 05 Jun 2013 05:06
URI: http://vuir.vu.edu.au/id/eprint/9950
DOI: https://doi.org/10.1109/ICEDSA.2010.5503069
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Citations in Scopus: 2 - View on Scopus

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