Modelling and analysis of fringing and metal thickness effects in MEMS parallel plate capacitors
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Shah, Kriyang, Singh, Jugdutt and Zayegh, Aladin 
ORCID: 0000-0002-0924-4840
(2006)
Modelling and analysis of fringing and metal thickness effects in MEMS parallel plate capacitors.
In: Microelectronics, MEMS, and Nanotechnology, 11 Dec 2005 - 14 Dec 2005, Brisbane, Australia.
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| Item type | Conference or Workshop Item (Paper) |
| URI | https://vuir.vu.edu.au/id/eprint/41537 |
| DOI | 10.1117/12.638385 |
| Official URL | https://www.spiedigitallibrary.org/conference-proc... |
| Subjects | Historical > FOR Classification > 0906 Electrical and Electronic Engineering Current > Division/Research > College of Science and Engineering |
| Citations in Scopus | 13 - View on Scopus |
| Download/View statistics | View download statistics for this item |
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