Modelling and analysis of fringing and metal thickness effects in MEMS parallel plate capacitors

Full text for this resource is not available from the Research Repository.

Shah, Kriyang, Singh, Jugdutt and Zayegh, Aladin ORCID: 0000-0002-0924-4840 (2006) Modelling and analysis of fringing and metal thickness effects in MEMS parallel plate capacitors. In: Microelectronics, MEMS, and Nanotechnology, 11 Dec 2005 - 14 Dec 2005, Brisbane, Australia.

Dimensions Badge

Altmetric Badge

Item type Conference or Workshop Item (Paper)
URI https://vuir.vu.edu.au/id/eprint/41537
DOI https://doi.org/10.1117/12.638385
Official URL https://www.spiedigitallibrary.org/conference-proc...
Subjects Historical > FOR Classification > 0906 Electrical and Electronic Engineering
Current > Division/Research > College of Science and Engineering
Citations in Scopus 12 - View on Scopus
Download/View statistics View download statistics for this item

Search Google Scholar

Repository staff login