Shah, Kriyang
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5 January 2006
5 January 2006
Number of items: 1.
5 January 2006
Shah, Kriyang, Singh, Jugdutt and Zayegh, Aladin ORCID: 0000-0002-0924-4840
(2006)
Modelling and analysis of fringing and metal thickness effects in MEMS parallel plate capacitors.
In: Microelectronics, MEMS, and Nanotechnology, 11 Dec 2005 - 14 Dec 2005, Brisbane, Australia.