Shah, Kriyang

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Shah, Kriyang, Singh, Jugdutt and Zayegh, Aladin ORCID logoORCID: https://orcid.org/0000-0002-0924-4840 (2006) Modelling and analysis of fringing and metal thickness effects in MEMS parallel plate capacitors. In: Microelectronics, MEMS, and Nanotechnology, 11 Dec 2005 - 14 Dec 2005, Brisbane, Australia.